Wafer Bumping  12" Bumping


Product Overview
 
Flip chip bumping shows an increasing part of the whole packaging business and becomes a necessary technology in packaging house since the year 2000. While the wafer foundries are planning 12" wafer manufacturing for the cost-down reason and the ordering for 12" equipment overruns the ordering for 8" equipment consequently this year, the request of 12" wafer bumping technology arises accordingly. The trend of flip chip bumping technology is especially important for portable and performance-oriented electronics, such as ultra large scale integrated circuits, such as processors, microprocessors, DSPs and ASICs, chips that typically have 1000 connections.

Flip chip bumping technology has also advantage in the low-pin count chips in the portable electronics market and in cell phones, for which the form factor is decisive.



Application
 
Processors
Microprocessors
DSPs
ASICs



Features
 
Size reduction
Weight reduction
Improved electrical performance
Cost saving



Reliability
 
Package Level
TCT JEDEC 22, A104-A
Condition B, -55°C to +125°C
1000 cycles
PCT JEDEC 22B, A102-B
121°C/ 15 psig / 100% RH
96 hours
THT JEDEC 22B, A101-A
85°C/ 85% RH
168/ 500/ 1000 hours
HTST JEDEC 22B, A103-A, 150°C 1000 hours



Standard Process/Materials
 
UBM sputter deposition UBM: Al/NiV/Cu
Cap photolithography  
Cap metal etch

 

Solder photolithography  
Solder deposition Solder bump: Eutectic PbSn, High lead, Low alpha, Leadfree
Final inspection  



Design Guideline
 
Peripheral pitch Array pitch UBM diameter Max. Passivation opening diameter Minimum final metal size Bump height mean Min. Distance from bond
pad center to die edge
381(15mil) NA 178 152 191 140 167
330(13mil) NA 152 127 165 130 142
254(10mil) NA 152 127 165 130 167
204(8mil) NA 102 80 115 100 95
152(6mil) NA 90 70 102 87 128
128(5mil) NA 75 55 88 75 105
NA 394(15.5mil) 178 152 191 140 167
NA 343(13.5mil) 152 127 165 130 142
NA 254(10mil) 102 80 115 100 130
NA Staggered2
27(9mil)
102 80 115 95 108
NA 227(9mil) 90 70 103 100 104
NA 204(8mil) 80 60 93 90 91
NA 177(7mil) 80 60 90 78 79



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