Wafer Bumping  Solder Bumping


Product Overview
 
ASE’s wafer bumping service currently provides printed eutectic (63Sn/37Pb), high lead (90/10), low alpha (< 0.02 cph/cm2) eutectic solder bumping on 6” and 8” silicon wafers. The capacity will be 30000 pcs/month by the end of 2001. The fine-pitch capability of printed eutectic solder bumping is 160um for area array and 150um for peripheral type of devices.

To improve joint reliability and process yield of the wafer bumping on very fine peripheral bond pad, the redistribution process is needed. Redistribution technology allows the re-layout of the inter-connection from the locations of peripheral bond pads to new area pad array without changing the die design. This method widens the very fine pad pitch, and allows wider under bump metallurgy (UBM) for larger bumps. The advantages are extended thermal cycle fatigue life, better underfill flow, and greater tolerance of board flatness variation. ASE’s redistribution process will be service by 2001Q3.



Application

 

Processors
Microprocessors
DSPs
ASICs



Features
 
Size reduction
Weight reduction
Improved electrical performance
Cost saving
 



Reliability
 
Package Level
TCT JEDEC 22, A104-A
Condition B, -55°C to +125°C
1000 cycles
PCT JEDEC 22B, A102-B
121°C/ 15 psig / 100% RH
96 hours
THT JEDEC 22B, A101-A
85°C/ 85% RH
168/ 500/ 1000 hours
HTST JEDEC 22B, A103-A, 150°C 1000 hours



Standard Process/Materials
 
UBM sputter deposition UBM: Al/NiV/ Cu
Cap photolithography  
Cap metal etch  
Solder photolithography  
Solder deposition Solder bump: Eutectic PbSn, High lead, Low alpha, Leadfree
Final inspection  



Design Guideline
 
Peripheral pitch Array pitch UBM diameter Max. passivation
opening diameter
Minimum final
metal size
Bump height mean Min. distance from bond pad center to die edge
381(15mil) NA 178 152 191 140 167
330(13mil) NA 152 127 165 130 142
254(10mil) NA 152 127 165 130 167
204(8mil) NA 102 80 115 100 95
152(6mil) NA 90 70 102 87 128
128(5mil) NA 75 55 88 75 105
NA 394(15.5mil) 178 152 191 140 167
NA 343(13.5mil) 152 127 165 130 142
NA 254(10mil) 102 80 115 100 130
NA Staggered2
27(9mil)
102 80 115 95 108
NA 227(9mil) 90 70 103 100 104
NA 204(8mil) 80 60 93 90 91
NA 177(7mil) 80 60 90 78 79



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